Pneumatic Equipment for Clean Room Filters and Pressure Control Equipment Description Air filter Mist separator Micro mist separator Regulator Regulator with back flow mechanism Filter regulator Filter regulator with back flow mechanism Mist separator regulator Micro mist separator regulator Direct operated precision regulator Direct operated precision regulator with back flow mechanism Precision regulator Vacuum regulator Clean regulator Precision clean regulator 1 1 1 1 1 1 1 1 1 1 1 Series Particle generation grade by series 21- 1 1 1 1 1 1 1 1 1 1 1 . 1 10- 3 3 3 3 3 3 3 3 3 3 3 . . 1 3 Standard AF20 to 60 AFM20 to 40 AFD20 to 40 AR20 to 60 AR20K to 60K AW20 to 60 AW20K to 60K AWM20 to 40 AWD20 to 40 ARP20 to 40 ARP20K to 40K 10-IR1000 to 3000 10-IRV1000 to 3000 SRH3000/4000 SRP1000 10- 21- 10- 21- 10- 21- 10- 21- 10- 21- 10- 21- 10- 21- 10- 21- 10- 21- 10- 21- 10- 21- Particle Generation Grade Values in show grades. No grade applies to blanks. 81