Pneumatic Equipment for Clean Room Rotary Actuators Description Rotary actuator Rotary table Vane Rack & pinion 4 2 3 3 2 1 2 1 Series Particle generation grade by series 10- 11- 12- 13- 21- 22- Air Grippers Description Rotary actuated air gripper Wide opening parallel type air gripper 2 fingers 2 2 1 1 . . . . 2 2 1 1 Series Particle generation grade by series 10- 11- 12- 13- 21- 22- 2 fingers 3 fingers CRB1 11-CRA1 MSQ 10- 21- 11- 22- MHZ2 MHL2 MHR2 MHR3 11- 22- 11- 22- 11- 22- 11- 22- Particle Generation Grade Standard Standard Values in show grades. No grade applies to blanks. Air gripper 2 fingers 78