Pneumatic Equipment for Clean Room Cylinders Description Air cylinder Air cylinder Mini free mount cylinder Free mount cylinder Air cylinder Standard Compact cylinder Low speed cylinder Rodless cylinder Basic type Air cylinder Standard Double rod Direct mount type Standard Double rod Direct mount type End lock (Except rod-side lock) Standard Double rod Direct mount type 2 2 2 2 2 2 2 2 2 2 2 3 3 3 3 3 3 3 3 3 3 3 4 1 1 1 1 1 1 1 1 1 1 1 3 2 3 3 3 3 2 2 1 1 1 1 1 1 1 Series Particle generation grade by series Standard 10- 11- 12- 13- 21- 22- CJ2 CJ2W CJ2RA CM2 CM2W CM2R CBM2 CG1 CG1W CG1R CA2 CUJ CDU CQS CQ2 CQSX CQ2X CM2X 12-CY3B 10-/11- 21-/22- 10-/11- 21-/22- 10-/11- 21-/22- 10-/11- 21-/22- 10-/11- 21-/22- 10-/11- 21-/22- 10-/11- 21-/22- 10-/11- 21-/22- 10-/11- 21-/22- 10-/11- 21-/22- 10-/11- 21-/22- 10- 11- 10-/11- 21-/22- 10-/11- 21-/22- 10-/11- 21-/22- 10- 11- 10- 11- 10- 11- Particle Generation Grade Values in show grades. No grade applies to blanks. 76