Values in show grades. No grade applies to blanks. Pneumatic Equipment for Clean Room Directional Control Valves Description Series Particle generation grade by series Standard 10- 21- Note) Particle generation grades apply to threaded port connection type. Different grades apply to the one-touch fittings. For details, refer to page 74. 5 port solenoid valve 3 port solenoid valve 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 3 3 3 3 3 3 3 3 3 3 3 3 3 10-SY3000/5000/7000/9000 10-SV1000/2000/3000/4000 10-SYJ3000/5000/7000 10-SZ3000 10-S0700 VQ1000/2000 SQ1000/2000 10-VQD1000 10-SYJ300/500/700 10-V100 10-S070 10-SY100 VQ100 10- 21- 10- 21- 10- 21- Particle Generation Grade 75