AMH SUP IDG AME AMF SMC Precision clean regulator Stainless steel valve Clean gas filter or Clean air filter Pneumatic Equipment for Clean Room  Clean Blow System  Example of Air Line Equipment  Example of N2 Equipment Example of clean air equipment Fittings: Clean one-touch fittings Piping : Polyolefine tubing Clean: Oil-free, Assembled in clean room Clean regulator Clean gas filter Pressure switch SUP Feature (Line C) Excellent corrosion resistance (Body: Stainless steel 316L) Integral fitting type Seal material : Fluoropolymer or Stainless steel Precision cleaning, Assembly in clean room Example of equipment to suit each clean blow grade Line A Line B Line C : For clean blow : For clean blow (with clean gas filter, or with clean air filter) : For N2 blow Change in particle generation with time 0 1 2 3 4 5 6 7 8 9 10 0 2 4 6 8 10 Particle generation (particles/min) Particle diameter: 0.1 μm or more Valve operating frequency: 0.5 Hz Line A Line B Valve operating cycle (times) x 104 Line A Line A Line B Line C Line B 73