Pneumatic Equipment for Clean Room Following are the actuator driving system and circuit configuration of blow system employed to reduce particle generation when using pneumatic equipment in a clean room. 10-/12-/21-series (Atmospheric release type) 11-/13-/22-series (Vacuum suction type) Inside of clean room Outside of clean room Duct piping Outside of clean room Vacuum regulator Vacuum pump Outside of clean room Ejector Duct piping q w e r t t q Relief port piping for cylinder w Exhaust piping for solenoid valve e Breathing piping for regulator r Drain piping t Exhaust cleaner for clean room/AMP series Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust cleaner for clean room/AMP series. With a vacuum pump When several air cylinders are used together or a model with high vacuum suction flow is used. With an ejector When a few air cylinders are locally used. System Circuit in Clean Room  Cylinder Relief Port Piping  Actuator Driving System 72