Pneumatic Equipment for Clean Room Copper, fluorine and silicon-free Lithium soap base grease Parts are washed and assembled in a clean room. General environment (assembly and inspection in a workshop) Standard packaging Note) None Fluorine grease . Lithium soap base grease Parts are washed and assembled in a clean room. Copper, fluorine and silicon-free General environment (assembly and inspection in a workshop) Standard packaging Note) 13-series Special clean series 21-series 22-series Note) Contact SMC for clean packaging. Note) Contact SMC for clean packaging. ・ Directional control valve ・ Pressure control equipment The same construction as the 10- series ・ Clean one-touch fittings (for driving system air piping) ・ Clean speed controller No sealant on thread parts . UNI thread is also applicable. (Made to Order) None Fluorine grease ・ Clean one-touch fittings (for driving system air piping) ・ Clean speed controller ・ Exhaust cleaner for clean room ・ Clean gas filter PTFE membrane element ・ Clean air filter Polyolefin hollow fiber membrane element ・ Double seal type / release to atmosphere Single seal type / vacuum suction (11- series equivalent) and specially treated guide ・ Guide cylinder ・ Air slide table ・ Clean rodless cylinder clean series 21-series Polypropylene resin Metal parts Brass (Electroless nickel plated) or Stainless steel 304 Ball bushing guide Linear guide Linear guide Special treatment No contact between the cylinder tube exterior and the slider interior Relief port Bushing Rod seal Rod seal Vacuum port (vacuum suction) Bushing Rod seal ・ Single seal type / vacuum suction blow to the surface with clean air. giving blow to the surface with clean air. assembled in a clean room. 71