Pneumatic Equipment for Clean Room Construction Construction Restricted material Assembly environment Packaging Grease Assembly environment Packaging Grease Basic Specifications of Other Equipment Basic Specifications of Actuators Restricted material None Fluorine grease . General environment (assembly and inspection in a workshop) . 10-series 11-series 10-series Special 12-series None Fluorine grease General environment (assembly and inspection in a workshop) Cylinder tube ・ Clean regulator ・ Clean one-touch fittings (for blow) Double seal type / release to atmosphere (10-series equivalent) and specially treated guide ・ Directional control valve ・ Air filter All wetted parts are made of stainless steel, FPM and PTFE, and exterior metal parts are made of anodized aluminum, which provides high corrosion resistance. ・ Double seal type / release to atmosphere ・ Guide cylinder ・ Dual rod cylinder Specially treated cylinder tube exterior ・ Rodless cylinder Wetted parts non-metal Polypropylene resin ・ Clean tubing Polyolefin-based resin Ball bushing guide Linear guide ・ Pressure control equipment Drain guide With female thread Main valve and pilot valve common exhaust Relief port With fitting in bleed port Fitting, speed controller, pressure switch, etc. have the same structure as those of standard. Relief port Bushing Rod seal Rod seal Vacuum port (vacuum suction) Bushing Rod seal ・ Single seal type / vacuum suction Clean packaging: Products are sealed in antistatic double bags after giving Clean packaging: Products are sealed in antistatic double bags after Parts are washed and 70