Clean room ISO Class 8 equivalent Surface wiped with alcohol (to remove oil) Clean room ISO Class 8 equivalent Clean booth ISO Class 5 equivalent Interior packed after blowing surface with clean air (anti-static electricity measures) Clean room ISO Class 8 equivalent Exterior packed (Double packing) Shipping Assembly and inspection in a standard workshop Clean booth ISO Class 5 equivalent Clean bench ISO Class 5 equivalent in Clean room ISO Class 7 equivalent Shipping Double packing Parts washed Assembly/Inspection Pneumatic Equipment for Clean Room Dust is kept from the clean room. 10-/11-/12-/13- (Clean Series) Assembled item in clean room (Special Clean Series) Particle concentration (particles/m3) Particle diameter (μm) 105 104 103 102 10 1 0.1 0.5 1 . After inspection, the product is blown with high purity air (of ISO Class 5 equivalent clean bench) in a clean environment. . Products are sealed and shipped in anti-static double bags. Grade 4 (ISO Class 6 equivalent) Grade 2 (ISO Class 4 equivalent) Grade 1 (ISO Class 3 equivalent) Grade 3 (ISO Class 5 equivalent) Grading is based on SMC’s original system of designation, with a lower grade number indicating a smaller volume of particle generation. The information in parentheses indicates the upper limit of concentration for the cleanliness classes based on ISO 14644-1. Refer to page 85 “Particle Generation Measuring Method” and page 86 “Comparison of Cleanliness Standards”. Particle Generation Grade Classification Cleanliness Grade (Reference) SMC Fed.Std.209E Note) SI unit Grade 1 M1.5 M2.5 M3.5 M4.5 M5.5 M6.5 Grade 2 Grade 3 Grade 4 . . ISO 14644-1 ISO Class 3 ISO Class 4 ISO Class 5 ISO Class 6 ISO Class 7 ISO Class 8 Note) Fed.Std.209E was abolished in Nov. 2001, so these figures are for reference only. Note) In case of the one-touch fitting 10-KQ (that includes built-in one-touch fitting solenoid valve manifolds, and speed controllers with one-touch fittings), changes in internal pressure may cause the collet chuck to slide very slightly. This may result in particle generation, so please avoid using this item in Grade 1 or Grade 2 areas. However, there is no need for similar caution in the case of insert fittings (KF), miniature fittings (M/MS), clean one-touch fittings (KP/KPQ/KPG), or speed controllers with clean one-touch fittings (AS-FPQ/FPG). The 21- and 22-series are given standard packaging (assembly, inspection, packing, and shipping carried out in a standard workshop.) Contact SMC for clean packaging. 69