ISO Class 4 (Class M2.5) ISO Class 5 (Class M3.5) ISO Class 6 (Class M4.5) ISO Class 7 (Class M5.5) The above table is a simulated image only. For details on the particle generation grade of each equipment, refer to pages 75 through to 84. Figures in parentheses indicate for reference the cleanliness grade according to Fed.Std.209E (abolished in Nov. 2001). Clean Series Suitable for a clean environment. Prevents particle generation in a clean room. Suitable for environments where the presence of copper, fluorine or silicon materials is restricted. Structures are identical to the Clean Series (Grease and packaging are different from the Clean Series.) Copper, Fluorine, Silicon-free, Low-particle Generation Special Clean Series Adheres to an even higher standard of cleanliness than the Clean Series. The development of this line of products, from structure and materials to assembly environment, are all determined for clean environment use. Applicable equipment Grade 1 Grade 2 Grade 3 Grade 4 Applicable equipment Applicable equipment SMC pneumatic equipment for clean room undergoes particle generation testing, and is divided into particle generation levels (Grade 1 to 4). Equipment can be selected based on the cleanliness class of the clean room. Actuators (Cylinders, Rotary actuators, Air grippers), Directional control equipment, Flow control equipment, Filters, Pressure control equipment, Fittings/Tubings, Air preparation equipment, Pressure switches Note) The 11-, 12-, and 13-series are only applicable to actuators. Actuators (Cylinders, Rotary actuators, Air grippers), Directional control valves, Flow control equipment, Pressure control equipment, Fittings Note) The 22- series is only applicable to actuators. Clean rodless cylinders, Clean regulators, Clean one-touch fittings, Clean tubings, Clean gas filters, Clean air filters Pneumatic Equipment for Clean Room Clean Series 10-/11-/12-/13- series 10-/11-/12-/13- series 21-/22- series Clean room Clean blow 68