Non-Contact Equipment 0 0 Pressure dispersion in height direction Pressure dispersion in diameter direction Conventional SMC cyclone method Cyclone Pad Small vacuum area, higher-vacuum in the central part Large vacuum area, even pressure dispersion Air from the supply port is ejected from a nozzle on the cylindrical side to generate a whirlwind flow inside the cylinder and leading to the vacuum. (Cyclone effect.) Supply air is discharged to the atmosphere from between the suction surface and the workpiece. As a result, an air layer is generated between the cyclone pad and the workpiece, resulting in the workpiece being lifted without contact. Working Principle Solar battery cell Workpiece with uneven and/or viscous surface Liquid crystal glass Prevents deflection Substrate Film, Copper film, etc. Note) Open hole ratio within 1% Workpiece sensitive to scars or suction trace Thin workpiece Thin workpiece  Non-contact transfer is possible.  Initial cost/running cost 34% down. . Compared with other makers, with a workpiece mass of 12 kg (LCD mother glass G10) (Typ.)  Provides larger suction area and more even pressure dispersion! 0 5 10 15 20 25 30 35 40 0 0.1 0.2 0.3 0.4 Lifting force (N) Supply pressure (MPa) Lifting force . Supply pressure characteristic o100 o80 o60 o40 o20 Supply port Whirlwind flow Nozzle Workpiece Negative pressure (vacuum part) Air layer  Prevents suction traces, scars or dirt on the workpiece surface Cyclone Pad Made to Order Grease-free Non-contact transfer 66