High Vacuum Equipment Rodless Cylinder for Vacuum Series CYV Door Valve Series XGD Made to Order Series Features CYV Operating environment pressure [Pa (ABS)] Bore size (mm) Atmosphere to 1.3 x 10.4 15, 32  Air cylinder for vacuum transfer (1.3 x 10.4 Pa) Operating pressure range (Pa) Operating pressure (MPa) Atmospheric pressure to 1 x 10.6 Fluid Inert gas type vacuum Gate size (Height x Width) (mm) 46 x 236 50 x 336 0.4 to 0.6 Clean room High vacuum Clean room High vacuum 65