High Vacuum Equipment Stainless Steel High Vacuum Angle/In-line Valve Series XM/XY Slit Valve Series XGT Smooth Vent Valve Series XVD High Vacuum Straight Solenoid Valve Series XSA Series Angle In-line Features XMA XMC XMD XMH XYA XYC XYD XYH Actuation Flange size Air operated Manual Shaft seal system Bellows seal Bellows seal Bellows/ O-ring seal Valve type Single acting (N.C.) Manual Single acting (N.C.) Double acting Material Body: SCS13 (equivalent to stainless steel 304) Bellows: Stainless steel 316L Body: SCS13 (equivalent to stainless steel 304) Bellows: Stainless steel 316L Body: SCS13 (equivalent to stainless steel 304) Bellows: Stainless steel 316L 25 to 80 16 to 80 16 to 50  All-in-one integrated structure with high-precision casting, no gas buildup  Mounting interchangeable with Aluminum High Vacuum Angle Valve XL series (XM series)  High temperature type: 5 to 150°C Note) Size 16 is not available for In-line type. Series Features XVD Valve type Port size Normally closed (Open when pressured, Spring seal) Fluid Nitrogen, Air, Inert gas, etc. Piping VCRR SwagelokR 1/4B  With the valve and needle valve all in one unit, takes up 1/4 the space of conventional models  Major reduction in particles through the use of a metal diaphragm in the sheet portion  The flow rate of both initial air supply and main air supply can be adjusted. Series Features XGT Operating pressure range (Pa) Operating pressure (MPa) Atmospheric pressure to 1 x 10.6 Fluid Inert gas type vacuum Gate size (Height x Width) (mm) 32 x 222 46 x 236 50 x 336 0.45 to 0.6  Suitable for use as a block disk between the load lock chamber and transfer chamber, or the transfer chamber and process chamber, of semiconductor equipment High vacuum Clean room Clean blow High vacuum Clean room High vacuum Clean room Gas resistant High vacuum Series XSA Valve type Port size Normally closed direct operated 2 port solenoid valve Features Fluid Gas that will not corrode stainless steel (equivalent to Stainless steel 405) Piping VCRR/SWJ (Swagelok)R 1/4B, 3/8B  Reduced dust generation due to no metallic sliding parts Note) Note) 64 Clean room Heat resistant