High Vacuum Equipment Aluminum High Vacuum Angle Valve Series XL Aluminum One-touch Connection and Release High Vacuum Angle Valve Series XLAQ/XLDQ Series Features XLA XLAV (With solenoid valve) XLC XLCV (With solenoid valve) XLF XLFV (With solenoid valve) XLG XLGV (With solenoid valve) XLD XLH XLS XLDV (With solenoid valve) Actuation Flange size Air operated Manual Electromagnetic Shaft seal system Bellows seal O-ring seal Bellows/ O-ring seal Bellows seal Pressure balanced bellow seal Valve type Single acting (N.C.) Double acting Single acting (N.C.) Double acting Single acting (N.C.) Manual Single acting (N.C.) Material Body: Aluminum alloy Bellows: Stainless steel 316L Body: Aluminum alloy Body: Aluminum alloy Bellows: Stainless steel 316L Body: Aluminum alloy Bellows: Stainless steel 316L 16 to 80 16 to 160 16 to 80 25 to 80 16 to 50 16, 25  Strong against fluorine  Minimal gas emissions  Minimal heavy metal contamination  Suitable for high temperatures: 5 to 150°C  Improved resistance to corrosion by chlorine gas due to oxalic acid anodized treatment Series Features XLAQ XLDQ Actuation Flange size Air operated Shaft seal system Bellows seal Bellows seal O-ring seal Valve type Single acting (N.C.) Material Body: Aluminum Bellows: Stainless steel 316L 16 to 50 40, 50  One-touch connection and release (no tool)  Suitable for high temperatures: 5 to 150°C  Improved resistance to corrosion by chlorine gas due to oxalic acid anodized treatment Gas resistant High vacuum Gas resistant High vacuum Clean room Heat resistant Clean room Heat resistant 63