Temperature Control Equipment Water-cooled Thermo-chiller Series HRW High-performance chiller (Water-cooled type) Peltier-Type Chemical Thermo-con Series HED Fluoropolymer temperature control equipment for chemicals Peltier-Type Thermoelectric Bath Series HEB High-precision constant-temperature bath Peltier-Type Thermo-con Series HEC High-performance chiller Series Features HRW Circulating liquid Cooling method Temperature stability Cooling capacity Set temperature range 20 to 90°C 2 to 30 kW ±0.3°C Water-cooled refrigeration Fluorinated liquid, Clean water, Pure water, Ethylene glycol aqueous solution  Direct heat exchanger for water circulated within a plant  For temperature regulation within the temperature range where no freezer is needed  Proven performance with semiconductor process equipment, with a wide range of features such as high temperature stability, wide temperature range, failure testing, external signal.  Conforms to UL and SEMI specifications, CE marking.  Inverter type as standard Series Features HEC Circulating liquid Cooling method Temperature stability Cooling capacity Set temperature range 10 to 60°C 230 W 600 to 1200 W ±0.03°C ±0.03°C Peltier-type air cooled Peltier-type water cooled Clean water Clean water, Fluorinated aqueous liquid  For applications requiring high-precision temperature control  High-precision, refrigerant-free temperature control equipment employing Peltier elements  Simple structure and high reliability  Can easily be built into equipments with compact and low-vibration design  Compatible with wide range of power supply voltages  Conforms to UL specifications, CE marking. Series Features HEB Circulating liquid Cooling method Temperature stability Cooling capacity Set temperature range .15 to 60°C 140 W ±0.1°C Peltier-type water cooled Clean water, Fluorinated aqueous liquid  High-precision temperature-regulation thermostatic chamber that employs Peltier elements  Compact and low vibration  Unique agitation method keeps up-down temperature distribution to a minimum. Series Features HED Circulating liquid Cooling method Temperature stability Cooling capacity Set temperature range 10 to 60°C 300 to 750 W ±0.1°C Peltier-type water cooled Pure water, Chemicals  Heat exchanger employs Peltier elements for direct temperature control of chemicals  Fluoropolymer heat exchanger is suitable for a wide range of chemicals.  Conforms to UL specifications, CE marking. Temperature control Temperature control Temperature control Temperature control 62