Temperature Control Equipment Refrigerated Thermo-cooler Series HRG Economy type chiler (Three-phase power supply) Refrigerated Thermo-chiller Series HRZ High-performance chiller (Built-in inverter) Refrigerated Thermo-chiller Series HRZ High-performance chiller Refrigerated Thermo-cooler Series HRGC Economy type chiler (Single phase power supply) Series Features HRG Circulating liquid Cooling method Temperature stability Cooling capacity Set temperature range 5 to 35°C 1 to 15 kW ±1.0°C/ ±0.5°C Air-cooled refrigeration/ Water-cooled refrigeration Clean water, Pure water, Ethylene glycol aqueous solution  Air-cooled models provide cooling water wherever needed thanks to easy mounting and easy operation.  Proven performance with a wide range of applications such as lasers/ analysis equipment/LCD manufacturing equipment/mold temperature regulators, etc. Series Features HRGC Circulating liquid Cooling method Temperature stability Cooling capacity Set temperature range 5 to 35°C 1 to 5 kW ±1.0°C/ ±0.5°C Air-cooled refrigeration Water-cooled refrigeration Clean water, Pure water, Ethylene glycol aqueous solution  Air-cooled models provide cooling water wherever needed thanks to easy mounting and easy operation.  Proven performance with a wide range of applications such as mold temperature regulators/lasers/analysis equipment/LCD manufacturing equipment, etc.  Ideal for overseas models (single-phase 200 to 230 V)  Conforms to UL specifications, CE marking. Series Features HRZ Circulating liquid Cooling method Temperature stability Cooling capacity Set temperature range .20 to 40°C 20 to 90°C .20 to 90°C 1 to 15 kW ±0.1°C Water-cooled refrigeration Fluorinated liquid, Clean water, Pure water, Ethylene glycol aqueous solution  Proven performance with semiconductor process equipment, with a wide range of features such as high temperature stability, wide temperature range, failure testing, external signal.  All models conform to safety standards.  Conforms to UL and SEMI specifications, CE marking. Series Features HRZ Circulating liquid Cooling method Temperature stability Cooling capacity Set temperature range .20 to 90°C 1.8 to 10 kW ±0.1°C Water-cooled refrigeration Fluorinated liquid, Clean water, Pure water, Ethylene glycol aqueous solution  In addition to the state-of-the-art functions of the HRZ series, these models employ a DC inverter compressor to achieve better energy efficiency.  Wide temperature range and cooling capacity range covered by one unit  Suited to the short innovation cycle of semiconductor equipment, and capable of responding flexibly to changes in the process conditions.  Conforms to UL and SEMI specifications, CE marking. Temperature control Temperature control Temperature control Temperature control 61