Digital Flow Switches 2-Color Display Digital Flow Switch Series PFM Digital Flow Switch for Air Series PF2A Flow Sensor Series PFMV Series Features PFM Set flow range (l/min) 0.2 to 10 (0.2 to 5) 0.5 to 25 (0.5 to 12.5) 1 to 50 (1 to 25) 2 to 100 (2 to 50) ( ): For CO2  Air, N2, Ar, CO2  Grease-free  Integrated flow adjustment valve  Compact, Lightweight, Space-saving Integrated type Monitor Sensor Separate type Series Features PFMV Set flow range (l/min) 0 to 0.5 0 to 1 0 to 3 .0.5 to 0.5 .1 to 1 .3 to 3  Adsorption confirmation of minute workpieces  Repeatability: ± 2% F.S. or less  Response speed: 5 ms or less, withstand pressure: 500 kPa  Grease-free, RoHS compatible  Covers total range with one voltage monitor Monitor Sensor Separate type Series Features PF2A Set flow range (l/min) 1 to 10 5 to 50 10 to 100 20 to 200 50 to 500 150 to 3000 300 to 6000 600 to 12000  Integrated type and separate monitor type are available.  Switch output, accumulated pulse output, analog output  Capable of switching back and forth between cumulative and instantaneous flow  IP65  Grease-free (except 3000, 6000, 12000 l types) Integrated type Monitor Sensor Separate type Grease-free Sensors Grease-free Sensors Grease-free Water resistant (IP65) Sensors 55