Pressure Control Equipment Precision Clean Regulator Series SRP Clean Regulator Series SRH Series Features SRH Relief mechanism Set pressure (MPa) Non-relief Port size Rc1/8, 1/4, 3/8, 1/2 9/16-18UNF, 7/8-14UNF Low pressure type: 0.02 to 0.2 High pressure type: Relief Rc1/8, 1/4, 3/8, 1/2 0.05 to 0.7  Contamination controlled stainless steel regulator  Oil-free  Two types of diaphragm materials: PTFE, Fluoropolymer Series Features SRP Port size Set pressure (MPa) M5, 1/8 Low pressure type: 0.005 to 0.2 High pressure type: 0.01 to 0.4  High precision low flow consumption stainless steel regulator  Bleed air flow 0.5 l/min (ANR) or less (0.2 MPa at outlet pressure)  Setting sensitivity: 0.3% F.S.  Repeatability: 1% F.S. Clean room Clean blow Clean room Clean blow Note) Refer to page 43 for pressure gauge. Note) Refer to page 43 for pressure gauge. Clean Regulator/Fluoropolymer Type Series SRF Series SRF Metric size Applicable tubing O.D. Inch size Set pressure (MPa) o4 to o19 Integrated with fitting With nut Tube extension . Fitting size: 2 to 6 o1/8 to o3/4 Tubing O.D. o1/4 to o3/4 0.02 to 0.4 Features  Wetted parts Body: New PFA Diaphragm: PTFE  Recommended maximum flow rate: 20 l/min (SRF50) (0.3 MPa at inlet pressure, fluidization) Clean room Clean blow High purity Fluoropolymer 42