Air Preparation Equipment Clean Gas Filter Series SF SFA SFB SFB300 SFC Series Features SFA100/200/300 SFB100 Type Operating pressure Filtration Max. 0.99 MPa (Vacuum: 1.3 x 10.6 kPa) Max. 0.99 MPa (Vacuum: 1.3 x 10.6 kPa) 0.01 μm (Filtration efficiency 99.99%) Temperature (°C) 5 to 80 Temperature (°C) 5 to 120  Cartridge type allows element replacement. Cartridge type disc Cartridge type straight Disposable type straight Disposable type multiple disc Series Features SFB300 SFC100 Type Operating pressure Filtration Max. 0.99 MPa (Vacuum: 1.3 x 10.6 kPa) Max. 0.99 MPa (Vacuum: 1.3 x 10.6 kPa) 0.01 μm (Filtration efficiency 99.99%)  Compact disposable type for semiconductor industry Clean Air Module Series LLB Clean Air Filter/Hollow Fiber Element Series SFD Series Features SFD100 SFD200 Type Filtration Disposable type (Irreplaceable element) Cartridge type (Replaceable element) Operating pressure Max. 1.0 MPa 0.01 μm (Filtration efficiency 99.99%)  Built-in hollow fiber element  Pressure drop: 0.03 MPa (Inlet pressure 0.7 MPa, Max. flow rate)  Conforms to RoHS reduction of environmentally detrimental chemicals. SFD100 SFD200 Series Features LLB3 LLB4 Fluid Flow range (l/min (ANR)) Clean air N2 gas Note) Set pressure 0.05 to 0.4 MPa 5 to 100 50 to 500  Clean equipment modularized (Reduction of piping labor/Space-saving) Clean air is easily available.  Nominal filtration rating: 0.01 μm (Filtration efficiency 99.99%)  Wetted parts: Grease-free, Silicon-free  Assembled in a clean room, shipped and packed in a duplicate package LLB3  24 combinations available LLB4 Note) Inlet air conditions ISO 8573-1 Quality grade: Equivalent to 1.4.1 to 1.6.1 . High flow (3000 l, 8000 l) type can also be made to order. Filter is not adaptable to module. . High flow (4000 l) type can also be made to order. Clean blow Clean blow Clean blow Heat resistant 39