Actuators Electro-Pneumatic Hybrid Actuator W Driver PLC Regulator Encoder Motor Made to Order  Space-saving  High stopping accuracy System Stroke (mm) Speed (mm/sec) Workpiece: 40 kg Stopping accuracy (mm) ±0.05 200 250 Stepping motor Thrust (N) 710 (Reference value) Footprint area (mm2) 2500 Cross sectional area of bore size 40 mm cylinder tube Electro-Pneumatic Hybrid Actuator/ Guide Table Made to Order  Z-axis heavy duty transfer (80 kg) with increased speed, and intermediate stop (stopping accuracy: ± 0.05 mm)  Pressure control makes it possible to respond to load fluctuations.  Smaller motor size Ball screw Load Motor Air Load Motor Ball screw Motor Air Ball screw Load Single drive motor Separate (Motor & Air cylinder) Electro-pneumatic hybrid actuator 31 Intermediate stop Shock relief Intermediate stop Shock relief