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Photovoltaic Cell Manufacturing Process Equipment 10 Can be used at high vacuum of 10-6 Pa. This valve can be used for the exhaust systems, supply systems and block systems of vacuum chambers. High Vacuum . Aluminum High Vacuum Angle Valve Series XL . Aluminum One-touch Connection and Release High Vacuum Angle Valve Series XLAQ/XLDQ . Stainless Steel High Vacuum Angle/In-line Valve Series XM/XY . High Vacuum Straight Solenoid Valve Series XSA . Smooth Vent Valve Series XVD . Slit Valve Series XGT . Door Valve (Made to Order) Series XGD . Rodless Cylinder for Vacuum Series CYV  Exhaust System  Supply System  Block System  Transfer System Series XL Series XM Series XVD Series CYV Series XGT P.63 P.63 P.64 P.64 P.64 P.64 P.65 P.65 11