56 Non-Contact Transfer 7 Low Vacuum Cyclone Pad Series ZX Series XT661 Series ZFC Series ZP The vacuum-lift and transfer of a workpiece with uneven and/or viscous surface (solar battery cell) is possible. . Cyclone Pad (Made to Order) Prevents vibration and deflection of plates for thin film. . Air Levitation Rail (Made to Order) Equipment for vacuum-lift and transfer systems for workpieces. . Vacuum Ejector Series Z . Air Suction Filter Series ZF  . Vacuum Pad Series ZP . Sponge Pad Series ZP2 . Vacuum/Release Unit Series VQD1000-V Supply port Whirlwind flow Nozzle Workpiece Negative pressure (vacuum part) Air layer Working Principle Air from the supply port is ejected from a nozzle on the cylindrical side to generate a whirlwind flow inside the cylinder and leading to the vacuum. (Cyclone effect) Supply air is discharged to the atmosphere from between the suction surface and the workpiece. As a result, an air layer is generated between the cyclone pad and the workpiece, resulting in the workpiece being lifted without contact. Air levitation rail Air levitation rail mounting example Note) Frame must be provided by the customer. Frame Air layer Glass Photovoltaic Cell Manufacturing Process Equipment P.66 P.67 P.38 P.35, 36 P.37 P.37 P.36 9