High suspension force created by cyclone method: 20 N (supply pressure 0.4 MPa)  Space between adsorption area and workpiece: 0.1 mm or more Operating principle Clean air introduced from the supply port is expelled from the nozzle on the side of the cylindrical portion, and rotational air flow generates a vacuum inside the cylindrical portion (“cyclone effect”). The supplied air is blown out into the atmosphere from the space between the adsorption surface and the workpiece, and the negative pressure generated by this air and the cyclone effect is balanced against the weight of the workpiece. The air layer generated through this process suspends the workpiece with no points of contact. Supplied air Air layer Workpiece 0 10 20 30 0 20 40 60 80 100 120 140 Flow consumption (l/min (ANR)) At o60 Maximum suspension force (N) P1 = 0.1 MPa P1 = 0.2 MPa P1 = 0.3 MPa P1 = 0.4 MPa P1 = 0.1 MPa P1 = 0.2 MPa P1 = 0.3 MPa P1 = 0.4 MPa Flat panel with holes o1 (hole opening rate 1%) Flat panel Non-contact Pad Non-contact Pad Suction of workpiece with non-contact process Made to Order 25