Grading is based on SMC’s original system of designation, with a lower grade number indicating a smaller volume of particle generation. The information in parentheses indicates the upper limit of concentration for the cleanliness classes based on Fed.Std.209E-1992. Note) In case of the one-touch fitting 10-KQ (that includes built-in one-touch fitting solenoid valve manifolds, and speed controllers with one-touch fittings), changes in internal pressure may cause the collet chuck to slide very slightly. This may result in particle generation, so please avoid using this item in Grade 1 or Grade 2 areas. However, there is no need for similar caution in the case of insert fittings (KF), miniature fittings (M, MS), clean one-touch fittings (KP, KPQ, KPG), or speed controllers with clean one-touch fittings (AS-FPQ/FPG). SMC Fed.Std.209E SI unit Grade 1 M1.5 M2.5 M3.5 M4.5 M5.5 M6.5 Grade 2 Grade 3 Grade 4 ISO 14644-1 ISO Class 3 ISO Class 4 ISO Class 5 ISO Class 6 ISO Class 7 ISO Class 8 Particle concentration (particles/m3) Particle diameter (μm) 105 104 103 102 10 1 0.1 0.5 1 Grade 4 (Class M4.5 equivalent) Grade 2 (Class M2.5 equivalent) Grade 1 (Class M1.5 equivalent) Grade 3 (Class M3.5 equivalent) Classification Grade of Particle Generation Cleanliness Grade Dust is kept from the clean room. . After inspection, the product is blown with high purity air (of Class M3.5 clean bench) in a clean environment. . Products are sealed and shipped in anti-static double bags. 10-/11-/12-/13- (Clean Series) Assemblied item in clean room (Special Clean Series) Clean booth Class M3.5 Clean bench Class M3.5 in Clean room Class M5.5 Shipping Clean room Class M6.5 Surface wiped with alcohol (to remove oil) Clean room Class 100.000 Clean booth Class M3.5 Interior packed after blowing surface with clean air (anti-static electricity measures) Clean room Class M6.5 Exterior packed (double packing) Shipping Assembly and test is carried out in a standard work area. Double packing Parts washed Assembly/Test The 21- and 22-series are given standard wrapping (assembly, test, packing, and shipping carried out in a standard work area.) When clean wrapping is required, please contact SMC. Pneumatic Equipment for Clean Room For further details, please refer to front matter 23 “Particle generation measurement method” and front matter 24 “Specification comparison regarding cleanliness” in Japanese CAT.02-23, SMC Pneumatic Equipment for Clean Room. 23