Class M2.5 (ISO Class 4) Class M3.5 (ISO Class 5) Class M4.5 (ISO Class 6) Class M5.5 (ISO Class 7) The above illustration is a simulated image. For details on the particle generation grade of each equipment, please refer to Japanese CAT.02-23 (SMC Pneumatic Equipment for Clean Room). Clean Series Suitable for a clean environment. Prevents particle generation in a clean room. Suitable for environments where the presence of copper, fluorine or silicon materials is restricted. Structures are identical to the Clean Series (Grease and packaging configurations are different from the Clean Series.) Copper, Fluorine, Silicon-free, Low-particle Generation Special Clean Series Adheres to an even higher standard of cleanliness than the Clean Series. The development of this line of products, from structure and materials to assembly environment, are all determined for clean environment use. Applicable equipment Grade 1 Grade 2 Grade 3 Grade 4 SMC pneumatic equipment for clean room undergoes particle generation testing, and is divided into particle generation levels (Grade 1 to 4). Equipment can be selected based on the cleanliness class of the clean room. Actuators (Cylinders, Rotary actuators, Air grippers), Directional control equipment, Flow control equipment, Filters, Pressure control equipment, Fittings/Tubings, Air preparation equipment, Pressure switches, Clean gas filters Note) The 11-, 12-, and 13-series are only applicable to actuators. Actuators (Cylinders, Rotary actuators, Air grippers), Directional control valves, Flow control equipment, Pressure control equipment, Fittings Note) The 22- series is only applicable to actuators. Clean rodless cylinders, Clean regulators, Clean one-touch fittings, Clean tubings, Clean gas filters Series 10-/11-/12-/13- Series 21-/22- Applicable equipment Applicable equipment SMC Pneumatic Equipment for Clean Room Pneumatic Equipment for Clean Room 22