Clean Air Module (Made to Order) A regulator, ON/OFF valve, restrictor, flow switch, and filter have been combined into a single unit. Wetted parts: Grease-free Assembled in clean room, double packing Features Nominal filtration Series rating (μm) LLB2 Measurement flow rate (l/min) Port size o10 clean one-touch fitting 5 to 50 10 to 100 Set pressure (MPa) 0.01 0.05 to 0.4 LLB2 Clean Air Filter Built-in hollow fiber element Nominal filtration rating: 0.01 μm (Filtered particle efficiency 99.99%) Pressure drop: 0.03 MPa (Inlet pressure 0.7 MPa, Max. flow rate) Max. operating pressure: 2.0 MPa (at 20°C) Features Flow rate Series (l/min) SFD100 SFD200 SFD101 SFD102 Case material Type Disposable type (Irreplaceable element) Cartridge type (Replaceable element) Resin Resin Aluminum Stainless steel 100 500 100 100 SFD Filters Clean (Blow) Clean (Blow) 15