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Film Manufacturing Process Equipment Intrinsically Safe Explosion-proof System 5 Port Solenoid Valve: 51-SY Explosion-proof System Solenoid Valve: 50-VFE/VPE 5 Port Solenoid Valve: SY 5 Port Solenoid Valve: VQC Manifold with SUP Stop Valve: SS5Y-X460 P.2 P.2 P.2 P.2 P.3 Directional Control Valves Direct Operated 2 Port Solenoid Valve: VX2 Direct Operated 2 Port Solenoid Valve for Air: VCA Air Operated Chemical Valve: LVA/LVC P.17 P.17 P.17 Process Valves Fluororesin Fittings/Hyper Fitting: LQ1 Fluororesin Fittings/Hyper Fitting Flare Type: LQ3 P.17 P.17 Fluororesin Fittings Fluororesin Process Pump: PA/PAX/PB Fluororesin Process Pump: PA/PAP Process Pump: PAF P.18 P.18 P.18 Process Pumps Thermo-cooler (Constant temperature water circulating device): HRG Thermo-chiller (Constant temperature fluid circulating device ): HRZ P.18 P.18 Temperature Control Equipment Serial Transmission System: EX12/140 Serial Transmission System: EX500/510 P.4 P.4 Serial Transmission System Electro-Pneumatic Positioner: IP8000/8100 P.4 Instrumentation Equipment Smooth Cylinder: CQSY/CQ2Y/CM2Y/CG1Y/CA2Y Low Friction Cylinder (Metal seal type): MQQ/MQM Stainless Steel Cylinder: CJ5・S/CG5・S P.5 P.6 P.7 Actuators Stainless Steel Speed Controller: ASG Floating Joint (Stainless Steel): JS P.7 P.7 Flow Control Equipment / Related Products Compact Electro-pneumatic Regulator: ITV0000 Electro-pneumatic Regulator: ITV1000/2000/3000 Precision Regulator: IR1000/2000/3000 Clean Regulator: SRH P.8 P.9 P.10 P.10 Pressure Control Equipment Stainless Steel 316 One-touch Fittings: KQG Stainless Steel 316 Insert Fittings: KFG Clean One-touch Fittings (for Blowing): KP Polyolefin Tubing: TPH Soft Polyolefin Tubing: TPS Fluororesin Tubing: TL/TIL FEP Tubing: TH/TIH P.10 P.10 P.10 P.11 P.11 P.11 P.11 Fittings / Tubings Ionizer: IZS31 Electrostatic Sensor/Monitor: IZD10/IZE11 P.12 P.14 Static Electricity Removal Equipment Clean Air Module (Made to Order): LLB2 Clean Air Filter: SFD P.15 P.15 Filters Stainless Steel High Vacuum Angle Valve: XM Stainless Steel High Vacuum In-line Valve: XY High Vacuum Straight Solenoid Valve: XSA P.19 P.19, 20 P.20 High Vacuum Equipment Industrial Filter: FG P.21 Industrial Filters High Precision Digital Pressure Switch for General Purpose: ISE50 Digital Flow Switch for Air: PF2A Digital Flow Switch for Water: PF2W 2-Color Display Digital Flow Switch: PFM P.16 P.16 P.16 P.16 Pressure Switches / Flow Sensors Pneumatic Equipment for Clean Room P.22 Pneumatic Equipment for Clean Room Air Levitation Rail P.24 Air Levitation Rail Non-contact Pad P.25 Non-contact Pad Extended Period of Continuous Valve Energization Anti-ozone Equipment P.26 P.27 Technical Data 1