(a) (b) 5 10 15 20 25 30 0 10 20 30 40 50 60 70 50 130 150 200 250 300 0 20 40 60 80 100 120 50 120 150 200 0 10 20 30 40 400 350 Displacement (μm) Load (N) Displacement (μm) Load (N) Displacement (μm) Load (N) LER�ｭ10 LER�ｭ30 LER�ｭ50 LER10 (Basic type) LERH10 (High precision type) LERH50 (High precision type) LER50 (Basic type) LERH30 (High precision type) LER30 (Basic type) Displacement Load A 100 Deflection on the top of the table Deflection on the external surface of the table Size Allowable radial load (N) Allowable thrust load (N) Allowable moment (N・m) (a) (b) Basic type High precision type Basic type High precision type Basic type High precision type Basic type High precision type 10 78 86 74 78 107 2.4 2.9 30 196 233 197 363 398 5.3 6.4 50 314 378 296 398 517 9.7 12 [mm] Measured part LER (Basic type) LERH (High precision type) Deflection on the top of the table 0.1 0.03 Deflection on the external surface of the table 0.1 0.03 Table Displacement (Reference Value) Deflection Accuracy: Displacement at 180° Rotation (Guide) . Displacement at point A when a load is applied to point A 100 mm away from the rotation center. Allowable Load 4 Model Selection Series LER