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Motor option B: With lock o8H9 ( ) depth 6 8H9 ( ) depth 6 +0.030 0 +0.030 0 +0.036 0 +0.036 0 M4 x 0.7 depth 8 (F.G. terminal) o6H9 ( ) depth 7 114 6H9 ( ) depth 7 Vacuum port Rc1/8 Note 3) 35 25 68 160 124 49.5 63.5 73 Body mounting reference plane Note 2) 4 x M8 x 1.25 depth 12 90 122 (172) 129 7 (3.1) 124 47 35 Encoder cable (o7) Motor cable (o6) 58 39 (4) Stroke A (Table traveling distance) L 2±1 (64) (64) Encoder Z phase detecting position 17.5 70 Encoder cable ( o7) 186 (B: With lock/226) 6.7 47 Lock cable (o4.5) Motor cable (o6) 140 13 n x o6.8 B 30 E 200 C x 200 (=D) 25 79 Note 2) (158) Note 2) 28 Clean Room Specification Dimensions: Ball Screw Drive 11-LEJS63 (mm) Model L A B n C D E Without lock With lock 11-LEJS63Sョョ-300ョョ-ョョョョ 656.5 696.5 306 370 6 1 200 180 11-LEJS63Sョョ-400ョョ-ョョョョ 756.5 796.5 406 470 8 2 400 80 11-LEJS63Sョョ-500ョョ-ョョョョ 856.5 896.5 506 570 8 2 400 180 11-LEJS63Sョョ-600ョョ-ョョョョ 956.5 996.5 606 670 10 3 600 80 11-LEJS63Sョョ-700ョョ-ョョョョ 1056.5 1096.5 706 770 10 3 600 180 11-LEJS63Sョョ-800ョョ-ョョョョ 1156.5 1196.5 806 870 12 4 800 80 11-LEJS63Sョョ-900ョョ-ョョョョ 1256.5 1296.5 906 970 12 4 800 180 11-LEJS63Sョョ-1000ョョ-ョョョョ 1356.5 1396.5 1006 1070 14 5 1000 80 11-LEJS63Sョョ-1200ョョ-ョョョョ 1556.5 1596.5 1206 1270 16 6 1200 80 11-LEJS63Sョョ-1500ョョ-ョョョョ 1856.5 1896.5 1506 1570 18 7 1400 180 Note 1) Consult with SMC for adjusting the Z phase detecting position at the stroke end of the end side. Note 2) When mounting the actuator using the body mounting reference plane, use a pin. Set the height of the pin to be 5 mm or more because of chamfering. (Recommended height 6 mm) Note 3) This drawing shows the left type. Note 4) The amount of particle generation changes according to the operating conditions and suction flow rate. 6 Electric Actuator/High Rigidity Slider Type Ball Screw Drive Series 11-LEJS