1 10 100 1,000 10,000 100,000 1,000,000 10,000,000 100,000,000 0 0.1 0.2 0.3 0.4 0.5 0.6 Particle diameter [μm] Particle concentration [particles/m3] 1 10 100 1,000 10,000 100,000 1,000,000 10,000,000 100,000,000 0 0.1 0.2 0.3 0.4 0.5 0.6 Particle diameter [μm] Particle concentration [particles/m3] 1 10 100 1,000 10,000 100,000 1,000,000 10,000,000 100,000,000 0 0.1 0.2 0.3 0.4 0.5 0.6 Particle diameter [μm] Particle concentration [particles/m3] 1 10 100 1,000 10,000 100,000 1,000,000 10,000,000 100,000,000 0 0.1 0.2 0.3 0.4 0.5 0.6 Particle diameter [μm] Particle concentration [particles/m3] ISO Class 8 (Class 100000) 0 L/min (ANR) 20 L/min (ANR) 30 L/min (ANR) ISO Class 7 (Class 10000) ISO Class 6 (Class 1000) ISO Class 4 (Class 10) ISO Class 5 (Class 100) ISO Class 8 (Class 100000) 0 L/min (ANR) 50 L/min (ANR) 70 L/min (ANR) ISO Class 7 (Class 10000) ISO Class 6 (Class 1000) ISO Class 4 (Class 10) ISO Class 5 (Class 100) ISO Class 8 (Class 100000) 0 L/min (ANR) 30 L/min (ANR) 50 L/min (ANR) ISO Class 7 (Class 10000) ISO Class 6 (Class 1000) ISO Class 4 (Class 10) ISO Class 5 (Class 100) ISO Class 8 (Class 100000) 0 L/min (ANR) 50 L/min (ANR) 90 L/min (ANR) ISO Class 7 (Class 10000) ISO Class 6 (Class 1000) ISO Class 4 (Class 10) ISO Class 5 (Class 100) Clean Room Specification Particle Generation Characteristics 11-LEJS40/Ball Screw Drive Speed 600 mm/s Speed 1,200 mm/s Speed 600 mm/s Speed 1,200 mm/s 11-LEJS63/Ball Screw Drive 2 Electric Actuator/High Rigidity Slider Type Ball Screw Drive Series 11-LEJS