Incremental type Absolute type ISO Class 4*1 (Class 10)*2, *3 ! !Built-in vacuum piping ! Possible to mount the main body without removing the external cover, etc. Clean Room Specification Vacuum suction from t h e v a c u um p o r t minimizes external particle generation from the ball screw and guide. *1 ISO14644-1 *2 Federal Standard 209D *3 The particle generation characteristics change depending on the suction flow rate. Refer to page 2 for details. Vacuum suction Pulse input type/ Positioning type Series LECSA Pulse input type Series LECSB CC-Link direct input type Series LECSC SSCNET# type Series LECSS Max. work load: 85 kg Positioning repeatability: ±0.02 mm Max. acceleration/deceleration: 20,000 mm/s2 Ball Screw Drive Series 11-LEJS AC Servo Motor Type Size: 40, 63 * Port locations can be selected. Vacuum port INFORMATION Series 11-LEJS 12-E600 Electric Actuator/ High Rigidity Slider Type RoHS