. The Chemical Compatibility Table shows reference values only and does not guarantee successful use of chemicals in products. . SMC is not responsible for the accuracy of this data or for any damage arising out of the use of these chemicals. . Chemial Thermo-con is not designed to be explosion proof, so it is not suitable for flammable fluids. Note 1) Static electricity may be generated. Anti-static electricity countermeasures should be implemented. Flow friction may generate static electricity, which can cause electric discharge to the temperature sensor or other devices and cause a malfunction. It is possible to discharge electricity by using a conductive PFA tube, metal piping (metal flexible hose), or other type of tubing, and by installing a ground line. Note 2) Permeation of the chemical may be possible. The permeated chemical may have a moderate corrosion to inside components and it may effect their life time. If the chemical liquid has high concentration, permeation becomes greater, which effects the service life. In case the fluid has a possibility to generate corrosive gas, SMC recommends a nitrogen purge of the enclosure. N2 purge ports are located at the piping connection side of the heat exchanger. Series HED Applicable Fluids 10 to 40°C 10 to 40°C 10 to 60°C 10 to 60°C 10 to 60°C 10 to 60°C 10 to 60°C 10 to 60°C Hydrofluoric acid Buffered hydrogen fluoride Hydrofluoric acid and Nitric acid mixture Nitric acid (except fuming nitric acid) Hydrochloric acid Copper sulfate solution Sulfuric acid (except fuming sulfuric acid) Ozone Ammonium hydroxide Ammonia hydrogen peroxide solution Sodium hydroxide Deionized water Ultrapure water �ｱ Note 2) �ｱ Note 2) �､ �､ �､ �ｱ Note 2) �ｱ Note 2) �ｱ �ｱ Note 2) �ｱ Note 1) 2) �ｱ Note 2) �ｱ Note 1) �ｱ Note 1) Chemical Concentration Operating temperature range Compatibility 10 to 50°C Note) HED007 10 to 30°C 10 to 50°C Note) HED007 10 to 30°C HF: 10% or less HF: 10% or less HNO3: 5% or less HCI: 5% or less H2SO4: 96% or less H2SO4: 96% or less . NH3: 5% or less NaOH: 50% or less . . HF: 5% or less HNO3: 5% or less NH3: 5% or less H2O2: 20% or less Chemical Compatibility Table against the Wetted Parts Material in Chemical Thermo-con How to read the table: �ｱ: Useable �､: Consult with SMC separately. 1436