(Inert gas/Non-leak/Medium vacuum) For Air /Manifold Series VXE21/22/23 . Refer to “Glossary of Terms” on page 241 for details on the max. operating pressure differential and the max. system pressure. Normally Closed (N.C.) Max. operating pressure differential (MPa) Orifice dia. (mmo) 2 3 4.5 6 Model VXE2111-00 VXE2121-00 VXE2221-00 VXE2321-00 VXE2131-00 VXE2231-00 VXE2331-00 VXE2241-00 VXE2341-00 Max. system pressure (MPa) 3.0 Flow characteristics 1.5 0.6 1.5 3.0 0.2 0.35 0.9 0.15 0.35 0.59 1.2 2.3 4.1 C[dm3/(s・bar)] 0.48 0.45 0.46 0.30 b 0.18 0.33 0.61 1.10 Cv Symbol Solenoid Valve for Manifold/Valve Specifications Fluid and Ambient Temperature N.C. Note) Dew point temperature: .10°C or less Ambient temperature (°C) .20 to 60 Nil, R Fluid temperature (°C) Solenoid valve option symbol .10 Note) to 60 V .10 Note) to 60 Valve Leakage Rate NBR, FKM Seal material Leakage Air 1 cm3/min or less Non-leak/ Medium vacuum 10.6 Pa・m3/sec or less Internal Leakage Note) Value for V and M options (Non-leak/Medium vacuum) NBR, FKM Seal material Leakage Air 1 cm3/min or less Non-leak/ Medium vacuum 10.6 Pa・m3/sec or less External Leakage Note) Note) Individual SUP 1 1 2 2 1 2 Common SUP 198