Clean Series o12, o16, o20, o25, o32 o40, o50, o63, o80, o100 Clean series 10 11 Relief type Vacuum type Applicable for using inside the clean room graded Class 100 by making an actuator’s rod section a double seal construction and discharging by relief port directly to the outside of clean room. 10 C�ｭQ2B Bore size Stroke D(M)Z.1 Specifications Bore size (mm) Action Proof pressure Maximum operating pressure Cushion Piston speed Mounting Double acting, Single rod 1.5 MPa 1.0 MPa None Note) 30 to 400 mm/s Through-hole Note) o12 with auto switch: With rubber bumper (Standard) 30 to 300 mm/s 12 16 20 25 32 40 50 63 80 100 For details, refer to the separate catalog (CAT.E02-23), “Pneumatics Equipment for Clean Room.” 10-CQ2 series (Double seal) 11-CQ2 series (Single seal, Vacuum suction) Construction A relief port is provided in the area between the double rod seals to discharge the exhaust air outside of the clean room. Thus, the amount of dust generated has been reduced to 1/20 of that of an ordinary cylinder. Structurally identical to the “10-” series, the outer rod seal has been removed to evacuate through the vacuum port. This draws out any external air from the clearance between the rod and the cover to practically eliminate the generation of external dust. This should be used in an application that requires an even higher level of cleanliness than the 10- series. Vacuum port (Vacuum suction) Relief port Bushing Rod seal Bushing Rod seal .1 “Z” is not available for o12 to o25 without auto switches. Series CQ2 792