COM 32 [39] 40 [40.5] 21 [25] 31 [41] 2 1 31 [36] 31 [36] 25 [24] 32 [39] 40 [40.5] A B EA P EB 16 [19.5] 16 [19.5] 5 x 3/8, 1/2, 3/4 EA, EB port = 1/2 in case of 3/4 [For 3/4] 1/8 External pilot port 1/8 (PE port) [For 3/8, 1/2] 1/8 External pilot port 12 PE X EA P B A EB A B (Mounting hole) 2 x o7 174.5 [176.5] 100 9 [20] 48 60 72 [79] 161.5 [165.5] 189.5 [187.5] 2 21 [31] G1/2 (Non-locking) Manual override (Electrical entry) 3 x o2.3 34 8 11 2 [13] Light/Surge voltage suppressor (For FZ) 120.5 [129.5] 110 [119] (For FZ) 21 [25] 23 [25] 46 [55] 31 [39] 31 [39] 56 [60] 5 x 3/8, 1/2, 3/4 (Piping port) 134 [143] 5 1 3 G1/2 21 [31] Manual override (Non-locking) (Electrical entry) 3 x o2.3 A B COM 2 174.5 [176.5] 100 9 [20] (Mounting hole) 2 x o7 161.5 [165.5] 222 [220] B A EA P EB B A 48 60 72 [79] [For 3/4] 1/8 External pilot port 31 [41] 11 [13] 2 1/8 (PE port) [For 3/8, 3/2] 1/8 External pilot port 34 8 12 PE X 2 position single: VFR510 -�ｭF(Z) 01 2 position double: VFR520 -�ｭF(Z) 01 3 position closed center: VFR530 -�ｭF(Z) 3 position exhaust center: VFR540 -�ｭF(Z) 3 position pressure center: VFR550 -�ｭF(Z) 01 01 01 Series VFR5000 Plug-in: 2 Position Single/Double, 3 Position Closed Center/Exhaust Center/Pressure Center . Other dimensions are the same as the single type. [ ] = 3/4 [ ] = 3/4 1658