Model Series Model Type of actuation Flow-rate characteristics Note 1) Single Double Metal seal Rubber seal Metal seal Rubber seal Metal seal Rubber seal Metal seal Rubber seal Metal seal Rubber seal Rubber seal Metal seal Rubber seal Metal seal Rubber seal Metal seal Rubber seal Metal seal Rubber seal Metal seal Rubber seal Rubber seal Response time (ms) Note 2) Standard: 0.4 W 15 or less 20 or less 13 or less 20 or less 26 or less 33 or less 26 or less 33 or less 26 or less 33 or less 33 or less 29 or less 31 or less 20 or less 26 or less 38 or less 44 or less 38 or less 44 or less 38 or less 44 or less 44 or less 0.18 0.25 0.18 0.25 0.18 0.18 0.18 0.25 0.18 0.18 0.16 0.60 0.80 0.60 0.80 0.46 0.60 0.60 0.80 0.46 0.60 0.46 0.25 0.30 0.25 0.30 0.25 0.42 0.25 0.30 0.25 0.42 0.20 0.15 0.30 0.15 0.30 0.18 0.31 0.15 0.30 0.18 0.31 0.28 0.72 1.0 0.72 1.0 0.72 0.65 0.72 1.0 0.72 0.65 0.70 2.6 3.2 2.6 3.2 2.0 2.2 2.6 3.2 2.0 2.2 1.8 0.16 0.21 0.16 0.21 0.16 0.16 0.16 0.16 0.16 0.21 0.16 0.46 0.55 0.46 0.55 0.46 0.49 0.46 0.49 0.57 0.80 0.46 0.15 0.20 0.15 0.20 0.15 0.20 0.15 0.20 0.15 0.20 0.20 0.15 0.28 0.15 0.28 0.15 0.28 0.15 0.28 0.17 0.28 0.28 0.70 0.85 0.70 0.85 0.68 0.70 0.68 0.70 0.70 0.85 0.70 2.0 2.2 2.0 2.2 2.0 2.0 2.0 2.0 2.4 3.2 1.8 High-speed response: 0.95 W 12 or less 15 or less 10 or less 15 or less 20 or less 25 or less 20 or less 25 or less 20 or less 25 or less 25 or less 22 or less 24 or less 15 or less 20 or less 29 or less 34 or less 29 or less 34 or less 29 or less 34 or less 34 or less 29 or less 34 or less 13 or less 20 or less 40 or less 47 or less 40 or less 47 or less 40 or less 47 or less 47 or less 49 or less 51 or less 20 or less 26 or less 58 or less 64 or less 58 or less 64 or less 58 or less 64 or less 64 or less Weight (g) 67 77 95 105 VQ1100 VQ1101 VQ1200 VQ1201 VQ1300 VQ1301 VQ1400 VQ1401 VQ1500 VQ1501 VQ1 01 VQ2100 VQ2101 VQ2200 VQ2201 VQ2300 VQ2301 VQ2400 VQ2401 VQ2500 VQ2501 VQ2 01 Closed center Exhaust center Pressure center Dual 3-port valve Single Double Closed center Exhaust center Pressure center VQ1000 VQ2000 C [dm3/(s・bar)] C [dm3/(s・bar)] 1 → 2/4 (P → A/B) 2/4 → 3/5 (A/B → R1/R2) b Cv b Cv AC ABC Dual 3-port valve ABC Note 1) The values are given for port size C6: (VQ1000), C8: (VQ2000) without back pressure check valve. Note 2) As per JIS B 8375-1981 (Supply pressure 0.5 MPa; with indicator light/surge voltage suppressor; clean air The response time is subject to the pressure and quality of the air.) The values at the time of ON are given for double types. 4-position 3-position 2-position 4-position 3-position 2-position 1002 Plug-in Unit Base Mounted Series VQ1000/2000