
 |

Digital Flow Switch for
Deionized Water & Chemicals
Series PFD
|
| High
Corrosion Resistance |
| Body, Sensor : New PFA, Tubing : Super PFA |
| Reduced
particle generation |
| Karman Vortex has no moving parts and therefore
generates a minimum amount of dust particles |
| Minimum
measurable flow rate is available from 1.6 L/min. |
|
|
| Specifications |
| |
Remote
type |
PFD520
Sensor unit |
PFD300,301
Display unit |
| Flow rate
measurement range |
1.6 to 20 L/min **
|
| Output
specification * |
Switch
output
Accumulated pulse output |
| Piping
specification |
1/2
inch tubing |
| * Output selection can be
made at the touch of a button |
| ** The valve for viscosity 1mPas or
less. (The viscosity is almost same as that of 25oc
water.) |
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