Slit Valve
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series name
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to search the CAD data.
Slit Valve
XGT
Series/CAD
Operating pressure
range (Pa)
Fluid
Gate size
(Hight x Width)
Operating
pressure
XGT
Atmospheric pressure
to 1×10
-6
Inert gas type vacuum
32×222
46×236
50×336
0.4 to 0.6
AllProducts!
hvslit.htm
to search the CAD data. to search the CAD data.