Clean Gas Filter (Clean)

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Clean Gas Filter SFA
Cartridge Disk Type
Download a PDF file. PDF 1  (471kB)	Series/CAD Operating Pressure Filtration SFA100•200•300  Max. 1.0MPa Vacuum: 1.3 x 10-6kPa 0.01μm (Filtration 100% at 0.01μm) Features Catridge type allows element replacement

Clean Gas Filter SFB
Cartridge Straight Type
Download a PDF file. PDF 1  (471kB)	Series/CAD Operating Pressure Filtration SFB100•200  Max. 1.0MPa Vacuum: 1.3 x 10-6kPa 0.01μm (Filtration 100% at 0.01μm) Features Catridge type allows element replacement

Clean Gas Filter SFB
Disposable Straight Type
Download a PDF file. PDF 1  (471kB)	Series/CAD Operating Pressure Filtration SFB300  Max. 1.0MPa Vacuum: 1.3 x 10-6kPa 0.01μm (Filtration 100% at 0.01μm) Features Compact disposable type for semiconductor industry

Clean Gas Filter SFC
Disposable Disk Type
Download a PDF file. PDF 1  (471kB)	Series/CAD Operating Pressure Filtration SFC100  Max. 1.0MPa Vacuum: 1.3 x 10-6kPa 0.01μm (Filtration 100% at 0.01μm) Features Compact disposable type for semiconductor industry